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LAM/NOVELLUS Heaters

​LAM Low Profile Vector Pedestal  

Type
TMax
Process
P/N
12 '' Novellus Vector Low Profile Pedestal
~400 °C
PECVD
See List
02-033134-01
02-033134-00

C2 Altus Pedestal 

Type
T Max
Process
P/N
C2 Altus Pedestal D3
~400 °C
CVD-W
02-033134-01
C2 Altus Pedestal
~400 °C
CVD-W
02-033134-00

Heater Block

Type
T Max
Process
P/N
Heater Block 6'
~400 °C
PE-CVD
19-00155-XX
Heater Block 8'
~400 °C
PE-CVD
19-00154-XX
19-00154-00, 19-00154-01, 19-00154-04
19-00154-00, 19-00154-01, 19-00154-04
IMG_2816-Photoroom_edited.png
IMG_2817-Photoroom_edited.png

PreHeat

Type
T Max
Process
P/N
CIP PreHeat HTR
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